Level Set Methods for Etching, Deposition and Photolithography Development

Proceedings of SISPAD'96: Special Issue of IEEE Transactions on Computer-Aided-Design




D. Adalsteinsson

J.A. Sethian

david@math.unc.edu sethian@math.berkeley.edu
Mathematics Department Department of Mathematics
Lawrence Berkeley National Laboratory University of California, Berkeley
and
Lawrence Berkeley National Laboratory

Berkeley, California 94720






Please direct all comments about this web site to:
J.A. Sethian: sethian@math.berkeley.edu





Level set techniques are numerical techniques for tracking moving interfaces, and have been applied to a wide collection of problems in front propagating and surface advancement. The techniques are robust, accurate, unbreakable, and extremely fast, and can be applied to highly complex two and three dimensional surface topography evolutions in etching, deposition, and photolithography, including sensitive flux/visibility integration laws, simultaneous etching and deposition, effects of non-convex sputter laws demonstrating faceting, as well as ion-sputtered re-deposition and re-emission with low sticking coefficients, and surface diffusion.


This paper is a dynamic resource for the application of state-of-the-art level set methods to TCAD simulations in process simulations applied to semiconductor manufacturing. It serves as a general introduction to level set methods, reference point for current applications and simulations, and library of mpeg movies applied to this area.


Table of Contents:

Reference Papers:

The application of level set and Fast Marching techniques to problems of two and three dimensional surface evolution in etching, deposition, and lithography development has been described in a series of papers, including
Unified Level Set Method for Etching and Deposition: I Unified Level Set Method for Etching & Deposition>: II
Unified Level Set Method for Etching and Deposition: III Fast Marching Methods for Photolithography
Overview of Level Set Methods for Etching, Deposition, and Photolithography Development

If You Want To Learn More about Level Set Methods:

Introductory resources about level set methods and applications:


Level Set Methods:
Evolving Interfaces in Geometry, Fluid Mechanics,
Computer Vision and Materials Sciences

,

J.A. Sethian, Cambridge University Press, 1996.

Level Set Methods and Fast Marching Methods:
Evolving Interfaces in Computational Geometry,
Fluid Mechanics, Computer Vision and Materials Sciences

,

J.A. Sethian, Cambridge University Press, 1999.

Other Level Set Web Page Resources:

The Level Set Web Page
David Adalsteinsson's Web Page
R. Malladi's Web Page
R. Kimmel's Web Page

Sponsors

This work was supported in part by the Applied Mathematical Sciences, U.S. Dept. of Energy and the National Science Foundation's Division of Mathematical Sciences and Directorate for Computer and Information Science and Engineering

List of Available Publications on Level Set Methods:

List of available publications

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