Advantages and Disadvantages of Level Set Methods/Conclusions

Level set methods have been shown to be versatile, robust, accurate, and efficient techniques for a wide class of problems in etching, deposition, and photolithography development. They work by embedding the propagating front as the zero level set of a higher dimensional function, whose equation of motion resembles a Hamilton-Jacobi equation. This initial value partial differential equation is then solved using technology borrowed from the numerical solutions of hyperbolic conservation laws.

The resulting techniques are able to handle sharp corners and cusps in the propagating solution, as well as topological changes, and three-dimensional effects. By employing fast narrow band adaptive techniques, the computational labor is the same as other methods, with the advantages of increased accuracy and robust modeling.

The drawback to level set techniques is that they require considerable thought in order to construct appropriate velocities for advancing the level set function. Nonetheless, the reward is highly versatile techniques for a wide class of complex problems.

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