Advantages and Disadvantages of Level Set Methods/Conclusions
Level set methods have been shown to be versatile, robust, accurate,
and efficient techniques for a wide class of problems in
etching, deposition, and photolithography development. They work by
embedding the propagating front as the zero level set of a higher
dimensional function, whose equation of motion resembles a
Hamilton-Jacobi equation. This initial value partial differential
equation is then solved using technology borrowed from the numerical
solutions of hyperbolic conservation laws.
The resulting techniques are able to handle sharp corners and cusps in
the propagating solution, as well as topological changes, and
three-dimensional effects.
By employing fast narrow band adaptive techniques, the computational labor
is the same as other methods, with the advantages of increased accuracy and
robust modeling.
The drawback to level set techniques is that they require considerable
thought in order to construct appropriate velocities for advancing the
level set function. Nonetheless, the reward is highly versatile
techniques for a wide class of complex problems.
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