Fast Marching Level Set Methods for Three-Dimensional Photolithography
Proceedings, SPIE 1996 International Symposium on Microlithography, Santa
Clara, California, March, 1996.
Fast Marching Method, ,
introduced by Sethian
is a numerical technique for solving the Eikonal equation,
and results from combining upwind schemes for viscosity solutions of
Hamilton-Jacobi equations, narrow band level set methods, and a
fast $min$-heap algorithm.
On a rectangular grid of N total points, the fast marching level set method
computes the solution to the Eikonal equation from given initial
data in O(N log N) steps.
In a series of papers, we have applied this technique to a wide
collection of problems, including construction of geodesics on surfaces,
computer vision, shape-from-shading, and computation of earthquake travel
In this paper, we analyze the application of the fast marching method to
Our results show that application of this scheme results in three-dimensional
photolithography development times of under one minute on a Sparc 10
for rate functions defined on 100x100x100 grids.
We provide studies of timings, accuracy, and examples of realistic
applications to fully three-dimensional development.
Explanation of Fast Marching Method
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