Etching/Deposition from Distributed Source: Effects of Visibility
Physical Effects/Overview of Mechanism:
In the case of an external source, the flux function may be
emitted from many locations; further more, the strength of the flux function
may vary according to emitted angle. Since visibility plays an
important role in these calculations, techniques are required to
rapidly evaluate the visibility from each point of the advancing front
at each time step.
Level Set Methodology:
We determine the seen flux at each point of the advancing interface
at each time step using the level set methodology. The use of the level
set function itself reduces the computational labor required to
determine the visibility, since evaluation of the value of the level set
function in the test flux direction gives a rapid test of the seen visibility.
Deposition into a well: Visibility (shadowing) is important: (101K)
Cutaway view: as neck pinches, inside is shadowed: (244K)